HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. This model includes an energy-saving inverter compressor and inverter pump, achieving lower power consumption and requiring a lower average flow rate of facility water for refrigerant heat extraction. 10 kW of cooling capacity is available at 20°C coolant set point. Multiple coolant types can be selected for this model.
- Cooling capacity: 10kW
- Temperature range setting:
-20 to 90°C (fluorinated or ethylene glycol coolants)
-10 to 60°C (clear or deionized water coolant)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
- Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)