HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model requires a 60% ethylene glycol aqueous solution.
- Same specifications as fluorinated coolant type EXCEPT,
- Circulating fluid: 60% ethylene glycol solution